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It is understood that MEMS is a micro-electro-mechanical system, which integrates miniature sensors, micro-actuators, signal processing and control circuits, interface circuits, communication systems and power supplies. It is a typical multi-disciplinary frontier research field. The project was undertaken by Xi'an Jiaotong University Wiener Instrument Co., Ltd., Beijing Qingbird Yuanxin Microsystems Technology Co., Ltd. and Huazhong University of Science and Technology jointly developed, with a total investment of 10.5 million yuan. This topic is aimed at the special requirements of stress testing in the petrochemical, military, energy, and automotive industries. It is a MEMS pressure sensor with low, medium, and high ranges and working temperatures between -30 °C and 200 °C, and its mass production and practical technical problems. . This topic will be beneficial to the current research and development of high temperature pressure sensors in China in the petrochemical, military, energy and automotive industries as soon as possible to achieve commercialization and industrialization.
Xi'an Jiaotong University Wiener Instrument Co., Ltd. undertook the "863" MEMS field major special topic - "Manufacture and practical research of MEMS pressure sensors for important industries such as petrochemicals" successfully passed the acceptance of the expert group of the Ministry of Science and Technology.